Numerical simulation for sensitivity and accuracy enhancement of micro cantilever-based biosensor employing truss structure

dc.authoridElmi, Soheila/0000-0003-1434-6494
dc.authoridElmi, Zahra/0000-0003-1487-8570
dc.contributor.authorElmi, Soheila
dc.contributor.authorElmi, Zahra
dc.contributor.authorBahrami, Manouchehr
dc.date.accessioned2025-03-26T17:35:02Z
dc.date.available2025-03-26T17:35:02Z
dc.date.issued2019
dc.departmentİstanbul Esenyurt Üniversitesi
dc.description.abstractMicro-cantilevers are very effective and reliable devices for bio-sensing applications. In this work, a novel biosensor based on micro-cantilever array was designed, simulated and optimized for different bio-sensing applications with high sensitivity, high accuracy, high throughput, and high Q factor. A truss structure designed in the anchored end of the micro-cantilever which was effective in improving the sensitivity to increase detection accuracy. Also, the effects of the surrounding medium are minimized by this structure to achieve high Q factor and longer vibration for bio-sensor. All the results are compared by the conventional micro-cantilever. As a result, the Q factor is increased from 52.1 to 126.1 within water medium and from 51.8 to 120 within ethanol medium. The actuation of novel MCL is simulated by different piezoelectric materials, the results proof that the amplitude of displacement for the PZT-5H is more efficient than AlN.
dc.identifier.doi10.1007/s00542-018-4092-y
dc.identifier.endpage2214
dc.identifier.issn0946-7076
dc.identifier.issn1432-1858
dc.identifier.issue6
dc.identifier.scopus2-s2.0-85053217958
dc.identifier.scopusqualityQ2
dc.identifier.startpage2205
dc.identifier.urihttps://doi.org/10.1007/s00542-018-4092-y
dc.identifier.urihttps://hdl.handle.net/20.500.14704/1017
dc.identifier.volume25
dc.identifier.wosWOS:000470332300006
dc.identifier.wosqualityQ3
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoen
dc.publisherSpringer Heidelberg
dc.relation.ispartofMicrosystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanı
dc.rightsinfo:eu-repo/semantics/closedAccess
dc.snmzKA_WOS_20250326
dc.subjectmicro-cantilever based bio-sensing; label-free; surface stress; damping coefficient; sensitivity; quality factor
dc.titleNumerical simulation for sensitivity and accuracy enhancement of micro cantilever-based biosensor employing truss structure
dc.typeArticle

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